Reactive Diffusion between Ultra High Purity Iron and Silicon Wafer

Dynamic investigation of high-purity/high-conversion generic reactive distillation

Abstract This paper presents the nonlinear dynamic analysis of an ideal two-reactant-two product reactive distillation. The impact of disturbance magnitudes and directions on openloop stability of the system is studied. An analysis of the physicochemical phenomena present in reactive distillation processes that, under certain operational conditions, causes special types of nonlinear behavior is...

Hydrophobic silicon wafer bonding

Wafers prepared by an HF dip without a subsequent water rinse were bonded at room temperature and annealed at temperatures up to 1100 “C. Based on substantial differences between bonded hydrophilic and hydrophobic Si wafer pairs in the changes of the interface energy with respect to temperature, secondary ion mass spectrometry (SIMS) and transmission electron microscopy (TEM), we suggest that h...

High efficiency process development for defect-rich silicon wafer materials

Perforated diode neutron detector modules fabricated from high-purity silicon

Compact neutron detectors are being designed and tested for use as low-power real-time personnel dosimeters. The neutron detectors are pin diodes that are mass produced from high-purity Si wafers. Each detector has thousands of circular perforations etched vertically into the device. The perforations are backfilled with LiF to make the pin diodes sensitive to thermal neutrons. The prototype dev...

Phosphorus and boron diffusion gettering of iron in monocrystalline silicon

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